| Diameter | 2" | 3" | 4" | 5" | 6" | 8" |
| Grade | Prime | |||||
| Growth Method | CZ | FZ | ||||
| Orientation | < 1-0-0 > , < 1-1-1 > , < 1-1-0 > | |||||
| Type/Dopant | P Type/Boron , N Type/Phos, N Type/As, N Type/Sb | |||||
| Oxygen Content | 8-18 ppma |
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| Carbon Content |
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| Resistivity | 0.001 - 100 ohm-cm | |||||
| Life Time | >50us |
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